Txoj kev loj hlob sai hauv cov ntaub ntawv xov xwm thiab optoelectronics tau txhawb nqa kev hloov kho txuas ntxiv ntawm chemical mechanical polishing (CMP) technology.Ntxiv nrog rau cov khoom siv thiab cov ntaub ntawv, kev nrhiav tau ntawm cov khoom siv ultra-high-precision nto yog nyob ntawm kev tsim thiab kev tsim khoom ntawm cov khoom ua haujlwm siab abrasive, nrog rau kev npaj cov khoom sib xws polishing slurry.Thiab nrog kev txhim kho txuas ntxiv ntawm kev ua tiav ntawm qhov raug thiab kev ua haujlwm tau zoo, cov kev xav tau rau cov khoom siv polishing zoo kuj tau txais ntau dua thiab siab dua.Cerium dioxide tau dav siv nyob rau hauv qhov chaw precision machining ntawm microelectronic li thiab precision optical Cheebtsam.
Cerium oxide polishing hmoov (VK-Ce01) polishing hmoov muaj qhov zoo ntawm kev txiav muaj peev xwm, siab polishing efficiency, siab polishing raug, zoo polishing zoo, huv si chaw ua hauj lwm, tsis muaj kuab paug, ntev kev pab cuam lub neej, thiab yog siv dav hauv optical precision polishing thiab CMP, thiab lwm yam teb occupies ib qho tseem ceeb heev txoj hauj lwm.
Cov yam ntxwv tseem ceeb ntawm cerium oxide:
Ceria, tseem hu ua cerium oxide, yog ib qho oxide ntawm cerium.Lub sijhawm no, qhov valence ntawm cerium yog +4, thiab cov tshuaj formula yog CeO2.Cov khoom ntshiab yog dawb hnyav hmoov los yog cubic siv lead ua, thiab cov khoom tsis huv yog lub teeb daj lossis xim liab rau xim liab-xim av hmoov (vim tias nws muaj cov kab ntau ntawm lanthanum, praseodymium, thiab lwm yam).Nyob rau hauv chav tsev kub thiab siab, ceria yog ib tug ruaj khov oxide ntawm cerium.Cerium kuj tuaj yeem tsim +3 valence Ce2O3, uas tsis ruaj khov thiab yuav tsim CeO2 ruaj khov nrog O2.Cerium oxide yog me ntsis soluble hauv dej, alkali thiab acid.Qhov ceev yog 7.132 g / cm3, lub melting point yog 2600 ℃, thiab boiling point yog 3500 ℃.
Polishing mechanism ntawm cerium oxide
Lub hardness ntawm CeO2 hais tsis yog siab.Raws li pom nyob rau hauv cov lus hauv qab no, lub hardness ntawm cerium oxide yog tsawg tshaj li cov pob zeb diamond thiab txhuas oxide, thiab kuj qis dua cov zirconium oxide thiab silicon oxide, uas yog sib npaug rau ferric oxide.Yog li ntawd nws tsis yog technically ua tau rau depolish silicon oxide-raws li cov ntaub ntawv, xws li silicate iav, quartz iav, thiab lwm yam, nrog ceria nrog tsawg hardness los ntawm ib tug neeg kho tshuab taw tes ntawm view xwb.Txawm li cas los xij, tam sim no cerium oxide yog cov nyiam polishing hmoov rau polishing silicon oxide cov ntaub ntawv los yog cov ntaub ntawv silicon nitride.Nws tuaj yeem pom tau tias cerium oxide polishing kuj muaj lwm yam teebmeem ntxiv rau kev siv tshuab.Lub hardness ntawm pob zeb diamond, uas yog feem ntau siv sib tsoo thiab polishing cov ntaub ntawv, feem ntau muaj cov pa oxygen vacancy nyob rau hauv lub CeO2 lattice, uas hloov nws lub cev thiab tshuaj muaj pes tsawg leeg thiab muaj tej yam cuam tshuam rau polishing zog.Feem ntau siv cerium oxide polishing hmoov muaj qee yam ntawm lwm yam tsawg hauv ntiaj teb oxides.Praseodymium oxide (Pr6O11) kuj muaj lub ntsej muag-centered cubic lattice qauv, uas yog tsim rau polishing, thaum lwm yam lanthanide tsawg lub ntiaj teb oxides tsis muaj peev xwm polishing.Yog tsis hloov cov qauv siv lead ua ntawm CeO2, nws tuaj yeem tsim ib qho kev daws teeb meem nrog nws nyob rau hauv ib qho chaw.Rau high-purity nano-cerium oxide polishing hmoov (VK-Ce01), siab dua qhov purity ntawm cerium oxide (VK-Ce01), ntau dua polishing muaj peev xwm thiab lub neej ntev kev pab cuam, tshwj xeeb tshaj yog rau iav tawv thiab quartz optical lo ntsiab muag rau ib ntev.Thaum cyclic polishing, nws raug nquahu kom siv high-purity cerium oxide polishing hmoov (VK-Ce01).
Daim ntawv thov ntawm cerium oxide polishing hmoov:
Cerium oxide polishing hmoov (VK-Ce01), feem ntau yog siv rau polishing iav khoom, nws yog tsuas yog siv nyob rau hauv cov nram qab no teb:
1. Cov iav, iav lens polishing;
2. Optical lens, optical iav, lens, thiab lwm yam;
3. Txawb xov tooj screen iav, saib nto (saib qhov rooj), thiab lwm yam .;
4. LCD saib txhua yam ntawm LCD npo;
5. Rhinestones, kub pob zeb diamond (daim npav, pob zeb diamonds ntawm lub ris tsho), cov khoom siv teeb pom kev zoo (khoom kim heev chandeliers hauv lub tsev loj);
6. Crystal crafts;
7. Ib nrab polishing ntawm jade
Tam sim no cerium oxide polishing derivatives:
Qhov saum npoo ntawm cerium oxide yog doped nrog txhuas los txhim kho nws polishing ntawm optical iav.
Lub Tsev Haujlwm Saib Xyuas Kev Tshawb Fawb Technology thiab Kev Txhim Kho ntawm UrbanMines Tech.Txwv tsis pub, tau npaj siab tias qhov sib xyaw ua ke thiab kev hloov kho saum npoo ntawm polishing hais yog cov txheej txheem tseem ceeb thiab txoj hauv kev los txhim kho qhov ua tau zoo thiab qhov tseeb ntawm CMP polishing.Vim hais tias cov khoom particle tuaj yeem hloov kho los ntawm kev sib xyaw ntawm cov khoom sib xyaw ua ke, thiab cov khoom tawg yooj yim thiab polishing efficiency ntawm polishing slurry tuaj yeem txhim kho los ntawm kev hloov kho deg.Kev npaj thiab polishing kev ua tau zoo ntawm CeO2 hmoov doped nrog TiO2 tuaj yeem txhim kho kev ua haujlwm polishing ntau dua 50%, thiab tib lub sijhawm, qhov chaw tsis xws luag kuj raug txo los ntawm 80%.Lub synergistic polishing nyhuv ntawm CeO2 ZrO2 thiab SiO2 2CeO2 composite oxides;Yog li ntawd, kev npaj thev naus laus zis ntawm doped ceria micro-nano composite oxides yog qhov tseem ceeb rau kev txhim kho cov ntaub ntawv polishing tshiab thiab kev sib tham ntawm polishing mechanism.Ntxiv nrog rau qhov nyiaj doping, lub xeev thiab kev faib tawm ntawm dopant hauv cov khoom sib txuas kuj tseem cuam tshuam rau lawv cov khoom nto thiab polishing kev ua tau zoo.
Ntawm lawv, cov synthesis ntawm polishing hais nrog cladding qauv yog ntau txaus nyiam.Yog li ntawd, kev xaiv cov txheej txheem hluavtaws thiab cov xwm txheej kuj tseem ceeb heev, tshwj xeeb tshaj yog cov txheej txheem uas yooj yim thiab raug nqi.Siv hydrated cerium carbonate ua cov khoom siv tseem ceeb, aluminium-doped cerium oxide polishing hais tau tsim los ntawm cov txheej txheem ntub dej-theem mechanochemical.Nyob rau hauv qhov kev txiav txim ntawm cov neeg kho tshuab quab yuam, cov khoom loj ntawm hydrated cerium carbonate tuaj yeem cleaved rau hauv cov khoom zoo, thaum txhuas nitrate reacts nrog ammonia dej los tsim amorphous colloidal hais.Cov colloidal hais tau yooj yim txuas mus rau cerium carbonate hais, thiab tom qab ziab thiab calcination, aluminium doping tuaj yeem ua tiav ntawm qhov chaw ntawm cerium oxide.Txoj kev no tau siv los ua ke cov cerium oxide hais nrog ntau qhov sib txawv ntawm txhuas doping, thiab lawv cov polishing kev ua tau zoo.Tom qab tus nqi tsim nyog ntawm txhuas tau ntxiv rau saum npoo ntawm cerium oxide hais, tus nqi tsis zoo ntawm lub peev xwm saum npoo yuav nce, uas ua rau qhov sib txawv ntawm cov khoom abrasive.Muaj zog electrostatic repulsion, uas txhawb kev txhim kho ntawm abrasive suspension stability.Nyob rau tib lub sij hawm, kev sib nrig sib adsorption ntawm cov abrasive hais thiab cov zoo them mos txheej los ntawm Coulomb attraction kuj yuav ntxiv dag zog rau, uas yog zoo rau kev sib cuag ntawm lub abrasive thiab cov mos txheej nyob rau saum npoo ntawm polished iav, thiab txhawb nqa. kev txhim kho ntawm tus nqi polishing.